| 摘要 |
<p>PURPOSE:To provide an improved vacuum suck-up device having an automatically opening and closing function, for sucking up a thin sheet such as a glass mask, a reticle or the like, which may automatically prevent leakage of vacuum even without closing a manual valve for shutting off a vacuum source upon no use. CONSTITUTION:A vacuum suck-up device for sucking up a thin sheet with the use of an attraction force given by vacuum, includes 7 a valve element 2 adapted to make close contact with a valve seat 1 disposed between a suck-up surface 4 onto which the thin sheet is sucked up, and a vacuum source, for cutting off the flow of air, a port 5 through which air leaks when the valve element 2 makes close contact with the valve seat 1 so that the flow of air is cut off, and a spring 3 for lifting the valve element 2 from the valve seat 1.</p> |
