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发明名称
SPUTTERING CATHODE
摘要
申请公布号
JPH04301075(A)
申请公布日期
1992.10.23
申请号
JP19910089806
申请日期
1991.03.28
申请人
ALPS ELECTRIC CO LTD
发明人
SATO HIROSHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
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地址
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