| 摘要 |
PURPOSE:To obtain a highly sensitive acceleration detector with an excellent temperature characteristic. CONSTITUTION:A circular groove G is cut into the undersurface of a flexible board 50 and the central part thereof surrounded by a thin flexible part 52 makes a working part 51 while the outside of the flexible part 52 does a fixed part 53. The fixed part 53 is fastened on a support board 80 through a pedestal 70. The top central part 61 of a work 60 is joined on the underside of the working part 51 so that the work 60 is kept hung. A displacement electrode E0 is formed on the underside of the work 60 and fixed electrodes E1-E5 are formed on the top surface of the support board 80. When receiving acceleration, the work 60 is displaced to change the separation between facing electrodes. Thus, working acceleration can be detected by measuring a change in electrostatic capacitance at the opposed electrode. |
