| 摘要 |
PURPOSE:To reduce light deterioration bar keeping the optical band gap of an I-type layer of an mth cell positioned on the light incidence side wider than the gap of a (m+1)th cell, and setting the hydrogen concentration in the film of the mth cell to be lower than the concentration of the (m+1)th cell. CONSTITUTION:An intrinsic hydrogenated amorphous silicon layer and a hydrogenated amorphous silicon carbide layer are formed and laminated to constitute two layers. The optical band gap of an I-type layer 107 of a first cell on the light incidence side is made wider than the optical band gap of an I-type layer 104 of a second cell positioned on the side opposite to the light incidence side. The hydrogen concentration of the first cell on the light incidence side is made lower than the hydrogen concentration of the second cell positioned on the side opposite to the light incidence side. When the hydrogen concentration in the film is controlled, defects in the film are reduced, and the film quality like photosensitivity is improved. Light deterioration also is reduced in the film in which hydrogen concentration is reduced. |
