摘要 |
PURPOSE:To obtain similar function to a conventional two sectional PD by providing plural contact holes for a single photodetector, and arranging electrode wiring corresponding to the respective contact holes. CONSTITUTION:Plural contact holes 30-1 and 30-2 are provided for at least one photodetector 72 comprising the device, electrode wirings 32-1 and 32-2 corresponding to the respective contact holes 30-1 and 30-2 are arranged, separate two or more output terminals are taken out and detects an incident position to the photodetector 72 by means of these output. Thus, the similar function to the conventional two sectioned PD can be obtained with a single photodetector. |