VERFAHREN UND VORRICHTUNG ZUR FOTOLITHOGRAPHISCHEN HERSTELLUNG VON LANGEN GITTERMASSSTAEBEN

摘要

The description relates to a process and device by means of which grid scales of any length can be reproduced with a grid constant in the mu m range. A model scale is first imaged continuously in steps on a flexible metal strip coated with a photo-resist. A sensor coupled to the imaging device detects the structures in the exposed photo-resist. Holders for the flexible metal strip on the imaging device and the imaging device bench which can be switched on alternately take further sections of the metal strip in succession into the imaging field by relative movements between the imaging device and the bench. Control signals derived from the sensor ensure the proper phase positioning of the images of the model scale.