MANUFACTURE OF ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY ELEMENT

摘要

PURPOSE:To make excellent ohmic connections between a semiconductor film, and a source electrode and a drain electrode without making the semiconductor film to corrode with peeling liquid for resist. CONSTITUTION:The active matrix type liquid crystal display element which uses a thin film transistor(TFT) 12 having on a semiconductor holding film 5 on the semiconductor film 4 as a switching element is manufactured. When a semiconductor protection film 5 is patterned and formed by photolithography in this manufacture, the resist 6 on the semiconductor protection film 5 is peeled after an oxide film 7 is formed on the exposed surface of the semiconductor film 4.