摘要 |
PURPOSE:To eliminate a need for a monitoring area and to reduce area for chips by using a part of a dummy cell area as a measurement cell area. CONSTITUTION:Respective dummy memory cell incorporated in a prescribed part of dummy cell areas 3a and 3b is changed into a measurement cell 61. As to the measurement cell, one end of a load resistance R3 is connected to either one drain of driving transistors Q5 and Q6 and the gates of transistors Q7 and Q8 for transfer gate are grounded to always keep the OFF state of these transistors Q7 and Q8. The other end of the respective load resistance R3 is connected to a measurement pad 7. |