发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To eliminate a need for a monitoring area and to reduce area for chips by using a part of a dummy cell area as a measurement cell area. CONSTITUTION:Respective dummy memory cell incorporated in a prescribed part of dummy cell areas 3a and 3b is changed into a measurement cell 61. As to the measurement cell, one end of a load resistance R3 is connected to either one drain of driving transistors Q5 and Q6 and the gates of transistors Q7 and Q8 for transfer gate are grounded to always keep the OFF state of these transistors Q7 and Q8. The other end of the respective load resistance R3 is connected to a measurement pad 7.
申请公布号 JPH04298899(A) 申请公布日期 1992.10.22
申请号 JP19910064226 申请日期 1991.03.28
申请人 NEC CORP 发明人 KAMIOKA JUNJI
分类号 G11C11/413;G11C29/00;G11C29/04;G11C29/12;H01L21/8244;H01L27/11 主分类号 G11C11/413
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