发明名称 PROBE OF ULTRASONIC MICROSCOPE
摘要 PURPOSE:To achieve a measurement of a number of samples at a high accuracy with one probe. CONSTITUTION:A piezo-electric element 3a is arranged at the upper center of an acoustic lens 1 and ring-shaped voltage elements 3b-3e in the perimeter thereof. The numeral 2 denotes a lower electrode and the symbols 4a-4e denote upper electrodes. The phase of a pulse voltage for every piezo-electric element from a pulse 10 is changed properly using phase shifters 11b-11e to allow the changing of a sound field of a backward focal plane of the acoustic lens 1. This enables the obtaining of a proper V (Z) curve about an object sample thereby achieving a highly accurate measurement.
申请公布号 JPH04299252(A) 申请公布日期 1992.10.22
申请号 JP19910087341 申请日期 1991.03.28
申请人 HITACHI CONSTR MACH CO LTD 发明人 FUJISHIMA KAZUO
分类号 G01N29/06;G01N29/24 主分类号 G01N29/06
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