发明名称 POSITIONING, FOCUSING AND MONITORING OF GAS PHASE SELECTIVE BEAM DEPOSITION
摘要 A method and apparatus for selectively depositing a layer of material from a gas phase to produce a part comprising a plurality of deposited layers. The apparatus includes a computer controlling a directed energy beam, such as a laser, to direct the laser energy into a chamber substantially containing the gas phase to preferably produce photodecomposition or thermal decomposition of the gas phase and selectively deposit material within the boundaries of the desired cross-sectional regions of the part. For each cross section, the aim of the laser beam is scanned over a target area and the beam is switched on to deposit material within the boundaries of the cross-section. Each subsequent layer is joined to the immediately preceding layer to produce a part comprising a plurality of joined layers. In an alternate embodiment of the present invention, a gas phase is condensed on a surface and a laser beam is used to selectively evaporate, transform, activate or decompose material in each layer. The apparatus of the present invention preferably comprises a computer controlled laser generating and scanning system for selectively depositing or evaporating material to produce a part. The present invention further comtemplates an n-degree of freedom positioning apparatus for positioning a target outer layer and a detecting apparatus which can non-intrusively detect the position and thickness of the deposited layer, both of which are close looped into a computer to produce the desired part.
申请公布号 AU1583592(A) 申请公布日期 1992.10.21
申请号 AU19920015835 申请日期 1992.03.13
申请人 THE BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM 发明人 HARRIS L. MARCUS
分类号 B23K26/04;B23K26/08;B29C67/00;C23C16/01;C23C16/04;C23C16/44;C23C16/52 主分类号 B23K26/04
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