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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH04297032(A)
申请公布日期
1992.10.21
申请号
JP19910039774
申请日期
1991.03.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
KANEOKA TATSUNORI;HAGIWARA KATSUTOSHI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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