DRY ETCHING METHOD AND APPARATUS,申请号JP19910062839-传众专利搜索

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发明名称	DRY ETCHING METHOD AND APPARATUS
摘要
申请公布号	JPH04298034(A)	申请公布日期	1992.10.21
申请号	JP19910062839	申请日期	1991.03.27
申请人	HITACHI LTD	发明人	NAWATA MAKOTO;KANAI SABURO;ITO SATORU;SATO YOSHIE
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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