| 摘要 |
<p>PURPOSE: To obtain a rotational rate sensor having small structural volume at a low manufacturing cost. CONSTITUTION: The rotational rate sensor comprises a fixed frame 11 and a sensor element 10 comprising oscillators 21, 31, 411, 412 and coupled through webs 22, 32, 421, 422 with the fixed frame 11 such that they can oscillate relatively in two vertical direction. The rotational rate sensor comprises means for exciting the oscillator in first oscillatory direction in the plane of the frame 11, means for detecting the torsion of the oscillator in second oscillatory direction as a measurement signal, and a cover for the sensor element 10 in the second oscillatory direction. The sensor element 10 has laminar structure including at least one layer of ceramic substrate composing a part of the frame 11, a part of at least one oscillator and webs 22, 32, 421, 422. A circuit element for exciting at least one oscillator and detecting the measurement signal is applied to the ceramic substrate and coated with a thick film of sintered paste.</p> |
