| 摘要 |
PURPOSE:To easily obtain a reticle free from defect according to a desired pattern by installing a liquid crystal drive part applying voltage to a part of a plurality of transparent electrodes on the basis of the input data. CONSTITUTION:When the pattern designing data (d) is inputted into a liquid crystal driving part 2, a CPU drive-controls the drive on the basis of the pattern designing data (d). When voltage is applied on the prescribed transparent electrode 3 in a liquid crystal part 1 by the drive, a liquid crystal pattern 6 is formed. The liquid crystal pattern 6 is based on the pattern designing data (d), and several kinds of liquid crystal patterns 6 can be formed by giving several kinds of pattern designing data (d). Since the liquid crystal part 1 thus formed does not allow the transmission of the wave length of the light used in light exposure, the part irradiated with light is removed when a positive resist is used as photoresist, and the pattern formation on the photoresist film is carried out as shown by the liquid crystal pattern 6 through which light does not transmit. |
