| 摘要 |
<p>PURPOSE:To attain improvement in throughput and yield and miniaturization of the apparatus when wafers are delivered in different gaseous atmospheres. CONSTITUTION:A wafer carrier is arranged so as to rise and fall in a load lock chamber 4. Its bottom is provided with a turntable 7a, which is so constructed not to interfere the rise and fall of the carrier 5. An optical path unit 8 is provided to detect the positional shift of the lowermost wafer, so that the photodetector part retreats out of a wafer W by rotation. The carrier 5 is raised intermittently to store wafers one by one from top, and then the carrier 5 is lowered to retain wafers one by one from bottom onto the turntable 7a, and is rotated to detect positional shifts optically. Therefore, once is sufficient for handling because a separate positioning is dispensed with.</p> |
