| 摘要 |
PURPOSE:To form a metallic film in a rectangular shape with good edging accuracy. CONSTITUTION:A consecutive excitation Q switch Nd:YAG laser (SHG) 10 by which high repetitive pulse output is obtained is used as a laser. A beam expander 9 and a slit mechanism 7 are arranged in a laser optical path, and a rectangular laser beam whose intensity distribution is uniform is projected to a photomask 3 in a chamber 2 by an objective lens 8. Stock gas A flowing on the surface of the photomask 3 is dissociated at a part irradiated with the rectangular laser beam, and the metallic film is formed on the photomask 3. By moving the photomask 3 on an XY stage 6, the metallic film is formed in a belt shape. The width of the metallic film in such a case is changed by varying the distance between the knife edges 7 of the slit mechanism 7. |
