High-efficiency, low-emissions cleaning method and apparatus

摘要

A cleaning apparatus that provides for immersion cleaning in one or two solvents. Using a source of inert gas and a recycling loop, the apparatus provides a drying zone above the solvents and prevents escape of solvent vapor into the surrounding atmosphere. The recycling loop maintains nonequilibrium vapor conditions and includes a centrifugal separator, which facilitates separation and recovery of the solvent vapors and the inert gas during normal operation of the system.