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经营范围
发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH04296022(A)
申请公布日期
1992.10.20
申请号
JP19910061512
申请日期
1991.03.26
申请人
HITACHI LTD
发明人
TSUKUNI KAZUYUKI;NOJIRI KAZUO;NAWATA MAKOTO;KANAI SABURO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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