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发明名称
摘要
申请公布号	JPH04117150(U)	申请公布日期	1992.10.20
申请号	JP19910020543U	申请日期	1991.04.01
申请人		发明人
分类号	C23C14/06;F02B37/12;F02B37/18;(IPC1-7):F02B37/12	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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