发明名称 MANUFACTURE OF ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY ELEMENT
摘要 <p>PURPOSE:To offer the manufacture of the high-yield active matrix type liquid crystal display element which eliminates a defect of a picture element electrode by preventing the reduction of an ITO due to the electrochemical reaction between Al and the ITO, facilitates the connection between a counter substrate and an external electrode, and exposes the low-resistance Al. CONSTITUTION:When the active matrix type liquid crystal display element is manufactured, the aluminum Al is sandwiched with other high melting point metal Cr in laminate structure up to a developing process for at least the resist patterning of a signal electrode line and a source and a drain electrode, and the high melting point metal Cr forming an upper layer is etched away in a subsequent process to expose the aluminum Al.</p>
申请公布号 JPH04293021(A) 申请公布日期 1992.10.16
申请号 JP19910059082 申请日期 1991.03.22
申请人 TOSHIBA CORP 发明人 HONJO MASUSHI
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/136
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