摘要 |
<p>PURPOSE:To offer the manufacture of the high-yield active matrix type liquid crystal display element which eliminates a defect of a picture element electrode by preventing the reduction of an ITO due to the electrochemical reaction between Al and the ITO, facilitates the connection between a counter substrate and an external electrode, and exposes the low-resistance Al. CONSTITUTION:When the active matrix type liquid crystal display element is manufactured, the aluminum Al is sandwiched with other high melting point metal Cr in laminate structure up to a developing process for at least the resist patterning of a signal electrode line and a source and a drain electrode, and the high melting point metal Cr forming an upper layer is etched away in a subsequent process to expose the aluminum Al.</p> |