| 摘要 |
PURPOSE:To obtain high saturation magnetic flux density, high resistivity, low magnetic distortion, and excellent permeability and high frequency characteristics, by adding a small amount of Pd to Co-Fe-B-F component system. CONSTITUTION:For increasing both saturation magnetic flux density and resistivity, a material having high saturation magnetic flux density must contain insulative element capable of increasing resistivity, i.e., gas elements, thereby obtaining a material having high saturation magnetic flux density and high resistivity. Soft magnetic material exhibiting high saturation magnetic flux density, however, mainly contains Co and Fe as the main component, and low magnetic distortion is large to be in the order of positive 10<5>, so that permeability is inclined to be not so improved. When a little amount, e.g. 1-5at%, of Pd is added to Co-Fe-B-F component system, a Co-Fe-B-F-Pd thin film can be obtained, which has high saturation magnetic flux density, high resistivity, and low magnetic distortion, and is excellent in permeability and its frequency characteristics. |
