DETECTION DEVICE FOR QUANTITY OF ELASTIC DEFORMATION OF CANTILEVER BEAM

摘要

PURPOSE:To make the structure simple and low in cost and enable measurement in a narrow space. CONSTITUTION:A reflecting mirror 7 is provided on the tip surface of the free end part 3b of the cantilever beam 3 made of an optical fiber which have bending curvature loss corresponding to the quantity of elastic deformation, the fixed end part 3a of the cantilever beam 3 is irradiated with the light from a light source 4, and part of the light exiting from the fixed end part 3a of the cantilever beam 3 after being reflected by the reflecting mirror 7 is guided sideward by a half-mirror 5; and a light quantity meter 6 detects the quantity of the light which is guided sideward by the half-mirror 5 to detect the bending curvature loss of the cantilever beam.