FORMING METHOD OF CONTACT HOLE,申请号JP19910058926-传众专利搜索

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发明名称	FORMING METHOD OF CONTACT HOLE
摘要
申请公布号	JPH04293230(A)	申请公布日期	1992.10.16
申请号	JP19910058926	申请日期	1991.03.22
申请人	SANYO ELECTRIC CO LTD	发明人	KANDA KOJI
分类号	H01L21/28;H01L21/302;H01L21/3065	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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