| 摘要 |
<p>PURPOSE:To enable the wafer delivery and the orientation flat alignment to be performed rapidly with high precision by a method wherein a wafer holding table and a holder are relatively turned so as to detect the wafer orientation flat by a detector provided on the holder. CONSTITUTION:A non contact sensor 17 as a detector mounted on the surface of a holder 37 in the peripheral part of a wafer holding table 26 is opposite to the peripheral part but in the non-opposite state to an orientation flat. Accordingly, the sensor 17 can detect the orientation flat of the wafer 1. On the other hand, a motor 55 is driven with one end of the holder 37 in the opposite state to a wafer carrier so that the holder 51a of an arm 51 may be aligned with the insertion position in the wafer carrier by driving the arm 51 in the wafer carrier direction. Next, the wafer carrier is lowered in specific dimension to deliver the wafer 1 to the holder 51a of the arm 51. Through these procedures, the wafer delivery and the orientation flat alignment can be performed rapidly with high precision.</p> |
