| 摘要 |
PURPOSE:To realize highly accurate pressure control of gas laser oscillator wherein injection lock is not unlocked even if gas pressure in laser chamber fluctuates. CONSTITUTION:A laser chamber 1 is coupled through a coupling pipe 21 with a reference pressure chamber 20 having approximately same pressure as the working pressure of the laser chamber. A gate valve 22 is provided in the coupling pipe 21 in order to partition between the laser chamber 1 and the reference pressure chamber 20. Furthermore, a differential pressure sensor 23 is disposed between the laser chamber 1 and the reference pressure chamber 20. Data detected through the differential pressure sensor 23 is delivered to a digital meter relay 10 and employed in ON/OFF control of a solenoid valve 8. |
