THIN FILM THERMAL HEAD AND ITS MANUFACTURING METHOD OF PROTECTIVE FILM

摘要

A method for manufacturing the protecting film of thermal head using the sputtering system comprising a sputter chamber, a cathode applying the RF power, a substrate holder, a gate valve and a vacuum pump. The method is executed by the following steps: installing the target of the wanted protecting material on the cathode and a substrate on the substrate holder; injecting non-reactive gas into the sputter chamber through the gas pipe; applying the RF power on the target side; applying lower RF power than that of the target side on the substrate side. This method is useful for preventing micro cracks and projecting parts from forming in the protecting film.