| 摘要 |
<p>PURPOSE:To improve the mounting property, durability, environmental resistance, safety, maintainability, etc., of a flow sensor. CONSTITUTION:After a metallic film of Ni, etc., is formed on the upper surface of a thin lower organic film 2 by a sputtering method, etc., and the patterns of an upstream-side heat sensitive sensor 3, downstream-side heat sensitive sensor 4, heater 5, and electrode 6 are formed by using a photomask, photoresist, and etching liquid, the surface of the film 2 is coated with a thin upper organic film 7. In addition, a lower reinforcing organic film 9 is formed on the lower surface of the film 2, with an air space 8 being left, and an upper reinforcing organic film 10 is formed on the upper surface of the film 2. Therefore, this flow sensor 1 can be formed in an elastically deformable state so as to improve the mounting property and, at the same time, the durability, environmental resistance, safety, and maintainability of the sensor 1 can be improved.</p> |
