TRANSFER ROBOT BETWEEN VACUUM CHAMBERS,申请号JP19910054998-传众专利搜索

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发明名称	TRANSFER ROBOT BETWEEN VACUUM CHAMBERS
摘要
申请公布号	JPH04290454(A)	申请公布日期	1992.10.15
申请号	JP19910054998	申请日期	1991.03.19
申请人	FUJITSU LTD;FUJITSU VLSI LTD	发明人	YOSHIDA MASAMI
分类号	B25J21/00;H01L21/677;H01L21/68	主分类号	B25J21/00
代理机构		代理人
主权项
地址

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