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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04291734(A)
申请公布日期
1992.10.15
申请号
JP19910056663
申请日期
1991.03.20
申请人
SHARP CORP
发明人
OKADA MANABU
分类号
H01L21/28;H01L21/027;H01L21/338;H01L29/778;H01L29/812
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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