发明名称 Radiation sensitive mixture, containing groups which are labile in acid environment and method for fabrication of relief patterns and relief images.
摘要 The invention relates to a radiation-sensitive mixture containing (a) a water-soluble polymeric binder which is soluble in aqueous alkaline solutions, and (b) an organic compound whose solubility in an aqueous alkaline developer is increased by exposure to acid and which contains at least one acid-cleavable group and, in addition, a group which forms a strong acid on exposure to radiation, and also, in addition, (c) an alkyl- or arylsulphonate of a hydroxy-aromatic compound. This mixture is suitable for fabricating relief patterns.
申请公布号 EP0508174(A1) 申请公布日期 1992.10.14
申请号 EP19920104744 申请日期 1992.03.19
申请人 BASF AKTIENGESELLSCHAFT 发明人 SCHWALM, REINHOLD, DR.;BINDER, HORST;FUNHOFF, DIRK, DR.
分类号 C08K5/42;C08K5/51;G03F7/004;G03F7/039;H01L21/027 主分类号 C08K5/42
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