| 摘要 |
PURPOSE:To obtain a desired thrust sufficiently with a drive force similar to conventional ones even when a Y-table is mounted on an X-table, and eliminate generation of an error or the like by production of backlash or the like. CONSTITUTION:Pulleys 18, 19 are provided rotatably through installation members 20, 21 at a lower surface of a movable table 3, pulleys 7, 8 are provided rotatably at both ends of it, and a motor 6 is installed at the pulley 7. Belt fixing support plates 17, 17' are fixed on a base 30 between the pulley 18 and the pulley 7, and between the pulley 19 and the pulley 8, one end of a belt 16 is installed and fixed at an upper surface of the belt fixing support plate 17, the other end is wound around the pulley 18 and the pulley 7 to be inserted under the belt fixing support plates 17 and 17', wound around the pulley 8 and the pulley 19, and installed to the belt fixing support plate 17'. |
