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发明名称
DRY ETCHING APPARATUS
摘要
申请公布号
JPH04290227(A)
申请公布日期
1992.10.14
申请号
JP19910053053
申请日期
1991.03.19
申请人
NEC YAMAGATA LTD
发明人
ONUMA HEIICHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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