发明名称 ATOMIC FORCE SENSOR HEAD
摘要 SZ 9-86-004 The atomic force sensor head comprises a cantilever beam (50) forming an integral part of a body (53) from which it extends such that it has a free end to carry a member (55) for interaction with a surface to be investigated. As said member (55) is brought close to said surface, atomic forces will cause a deflection of said cantilever (50). This deflection is translated into a variation of an electrical value, such as a capacitance. A capacitor (57) is formed by a pairof electrodes (51, 52) coated onto the cantilever beam (50) and said body (53), respectively. The deflection of said cantilever beam (50) causes a variation of the distance (s) between said electrodes (51, 52) and, hence, of the capacitance. An improvement of the sensitivity and stability of this arrangement is made possible by filling the gap between the said electrodes (51, 52) with materials (54, 56) having different dielectric constants and different thicknesses. With arelation of 1:10 of the dielectric constants and a thickness relation of 1:5, animprovement factor of about 40 can be obtained.
申请公布号 CA1308574(C) 申请公布日期 1992.10.13
申请号 CA19880565614 申请日期 1988.04.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BINNIG, GERD K.;DUERIG, URS T.;POHL, WOLFGANG D.;ROHRER, HEINRICH;GIMZEWSKI, JAMES K.
分类号 G01B7/34;G01B11/30;G01B21/30;G01D5/26;G01L1/08;G01N23/00;G01N37/00;G01Q20/02;G01Q60/38;G01R33/038;G11B9/00;G11B9/14;G11B11/00;G11B11/10;G11B17/32 主分类号 G01B7/34
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