| 摘要 |
PCT No. PCT/JP90/01138 Sec. 371 Date Apr. 25, 1991 Sec. 102(e) Date Apr. 25, 1991 PCT Filed Sep. 5, 1990 PCT Pub. No. WO91/03711 PCT Pub. Date Mar. 21, 1991.A photoelectric encoder characterized in that the grating substrate on the light emission side is composed of a plate-like light emitting element and in that light shielding members in the form of a thin film are arranged at regular intervals on the surface of the substrate which faces the reference grating. Since the light emitting element and the grating substrate on the light emission side are integrally provided with each other, reducing in the size and the weight of the apparatus and the number of parts is enabled.
|
