METHOD AND DEVICE FOR CONTROLLING CONTACT,申请号JP19900407939-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CONTROLLING CONTACT
摘要
申请公布号	JPH04287941(A)	申请公布日期	1992.10.13
申请号	JP19900407939	申请日期	1990.12.27
申请人	HITACHI LTD;HITACHI COMPUT ENG CORP LTD	发明人	ISOBE TERUO;ISO TADAO
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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