| 摘要 |
PURPOSE:To minimize the compression of the amount of exposure data and movement of a stage and to improve pattern exposing accuracy by aligning a generated field with a basic field with respect to data for arranging a repeating-pattern group and determining the exposure sequence so that the exposure sequence of the field approaches the movement of the basic stage. CONSTITUTION:The arranging data for a basic field and the exposing sequence are generated in response to an object to be exposed with an arranging data generating means 1. The arranging data are stored for every field with an arranging-data storing means 2. The coordinates of the individual arranging data of the basic field are compared with the coordinates of the arranging data of a repeating field contained in the data to be exposed in an exposing- sequence judging means 3, and the exposing sequence is judged. With an arranging-data sorting means 4, the exposing sequence of the repeating field is assembled into the exposing sequence of the basic field, the individual arranging data are sorted based on the final exposing sequence and the exposure is performed. |
