| 摘要 |
PURPOSE:To enhance an output and an efficiency of an excimer laser and to stabilize its output. CONSTITUTION:A preliminary ionization source 15 for preliminarily ionizing laser gas is provided. A timing for the preliminary ionization is set before a spiker capacitor 8 starts to be charged in a direction of reverse polarity to charging polarity of a sustainer capacitor 6 by a spiker charging power source 9 after a sustainer charging power source 7 starts charging the capacitor 6. The timing for the ionization is so controlled as to hold a discharge starting voltage constant with respect to a frequency of a repeating operation. |
