FINE WIRE WIDTH PATTERN FORMATION METHOD, EXPOSURE DEVICE AND COMBINATION STRUCTURE

摘要

PURPOSE: To form a pattern with an extremely thin line width on an insulating substrate. CONSTITUTION: A device has a conductive sharp chip 10, that is connected to a conductive spring cantilever spring 12. Electrons emitted from the sharp chip 10 move to the surface of an insulating substrate 24 and cause a change or affect molecules that approach the insulator surface. No tunnel current is required, and no highly conductive return current path for electrons that pass the insulating substrate is required as well. Incidence electrons change and they deposit a material onto the insulating substrate, etch the local region on the surface of the insulating substrate, or etch the surface of the insulating substrate, thus providing a patterned thin line width.