发明名称 |
Laser referencing system for refractively scanning interferometer |
摘要 |
A laser referencing system is disclosed which is used in a refractively scanning interferometer. The interferometer optics comprise a fixed wedge-shaped prism having a beamsplitter surface, a movable wedge-shaped prism, and two corner cube reflectors. A laser clocking beam enters the interferometer on a path below the infrared analytical beam, and leaves the interferometer on a path above the infrared beam. Quadrature control of the laser beams is used to control the ends of the scanning sweeps, eliminating the need for a third, "white light" interferometer beam. ZPD alignment is accomplished by horizontal adjustment of the fixed beamsplitter prism. The interferometer optics are supported three-dimensionally in a cast shell.
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申请公布号 |
US5155551(A) |
申请公布日期 |
1992.10.13 |
申请号 |
US19910663374 |
申请日期 |
1991.03.01 |
申请人 |
RESEARCH-COTTRELL TECHNOLOGIES, INC. |
发明人 |
VIDRINE, D. WARREN;PONCE, FRED H. |
分类号 |
G01B9/02;G01J3/453 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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