发明名称 Laser referencing system for refractively scanning interferometer
摘要 A laser referencing system is disclosed which is used in a refractively scanning interferometer. The interferometer optics comprise a fixed wedge-shaped prism having a beamsplitter surface, a movable wedge-shaped prism, and two corner cube reflectors. A laser clocking beam enters the interferometer on a path below the infrared analytical beam, and leaves the interferometer on a path above the infrared beam. Quadrature control of the laser beams is used to control the ends of the scanning sweeps, eliminating the need for a third, "white light" interferometer beam. ZPD alignment is accomplished by horizontal adjustment of the fixed beamsplitter prism. The interferometer optics are supported three-dimensionally in a cast shell.
申请公布号 US5155551(A) 申请公布日期 1992.10.13
申请号 US19910663374 申请日期 1991.03.01
申请人 RESEARCH-COTTRELL TECHNOLOGIES, INC. 发明人 VIDRINE, D. WARREN;PONCE, FRED H.
分类号 G01B9/02;G01J3/453 主分类号 G01B9/02
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