ETCHING METHOD OF SEMICONDUCTOR MULTILAYER FILM,申请号JP19910006437-传众专利搜索

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发明名称	ETCHING METHOD OF SEMICONDUCTOR MULTILAYER FILM
摘要
申请公布号	JPH04287918(A)	申请公布日期	1992.10.13
申请号	JP19910006437	申请日期	1991.01.23
申请人	NEC CORP	发明人	IDE YUICHI
分类号	H01L21/302;H01L21/3065;H01S5/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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