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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04287924(A)
申请公布日期
1992.10.13
申请号
JP19910006862
申请日期
1991.01.24
申请人
KAWASAKI STEEL CORP
发明人
IWAHASHI MASANORI
分类号
H01L21/316;H01L21/8247;H01L29/788;H01L29/792
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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