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发明名称
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04286132(A)
申请公布日期
1992.10.12
申请号
JP19910049664
申请日期
1991.03.14
申请人
TOSHIBA CORP
发明人
KASHIMA NORIYASU;ATSUMI KOICHIRO;SUEMATSU MUTSUMI;USHIJIMA AKIRA;OKANO KEITARO;HIROTA MITSUO;MURAKAMI YUICHI
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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