| 摘要 |
PURPOSE:To prepare a photo-mask even in an element having the different spaces of internal electrodes and the different size of laminated elements with high accuracy through a simple method by utilizing the exposed sections of the internal electrodes for forming the photo-mask. CONSTITUTION:A laminate, in which electrostrictive effect layers 1 and internal electrodes 2 are laminated alternately and the end faces of internal electrode plates are exposed to side end faces, is formed. DC voltage is applied among a pair of the internal electrodes and another one pair of the internal electrodes, and the positional shapes of the internal electrodes 2 are stored in a photo-mask 6 by an electric field 10 generated on the surface of the side face of the laminate. A photosensitive insulating film 11 is formed on the side face of the laminate, the internal electrodes exposed to the side face of the laminate and the peripheries of the internal electrodes are insulated selectively through exposure and etching treatment by using the photo-mask 6, and external electrodes 3, 3' are shaped of a conductive substance. Accordingly, the photo-mask conformed to the exposed patterns of the internal electrodes of separate laminate can be prepared easily without making the size of the laminate and distances among the internal electrodes agree. |
