| 摘要 |
PURPOSE:To make multipurpose utilization possible and to perform measurement within a wide angle range with high accuracy. CONSTITUTION:A first center shaft is roughly rotated by a theta direct motor 1 to rotate a sample stand 5 and the worm wheel 12 to which the theta direct motor 1 is fixed is rotated by a theta intermediate fine adjustment pulse motor 4 to make it possible to finely rotate a first shaft over a wide angle through the second shaft concentrically arranged with respect to the first shaft. Further, by finely moving the arm having the theta intermediate fine adjustment pulse motor 4 fixed thereto by a theta fine adjustment pulse motor 3, the first shaft is finely adjusted in a father detailed manner over a narrow angle range through the second shaft. Further, the free table 6 connected to the second shaft through a clutch 9 is made selectively rotatable and a 2theta table 8 is revolved by revolving the third shaft concentrically arranged with respect to the first and second shafts by a 2theta direct motor 2. |
