发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To provide a semiconductor device having a MOS structure and a manufacturing method thereof in which a channel length can be sufficiently shortened and a short-channel effect can be suppressed without reducing a junction depth of source/drain region. CONSTITUTION:A first conductivity type semiconductor substrate 1, a second conductivity type drain region 4 formed on the substrate 1, a gate insulating film 15 formed on the top of the region 4 through a first conductivity type channel forming region, an insulating film 5 formed in contact with the channel forming region on the substrate 1 and having a predetermined thickness, and a second conductivity type source region 10 formed in contact with the channel forming region on the film 5, are provided.
申请公布号 JPH04286128(A) 申请公布日期 1992.10.12
申请号 JP19910049608 申请日期 1991.03.14
申请人 FUJITSU LTD 发明人 OIKAWA KATSUO
分类号 H01L27/10;H01L21/336;H01L21/8242;H01L27/108;H01L29/78 主分类号 H01L27/10
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