| 摘要 |
PURPOSE:To simultaneously obtain anticipated superconduction in all wiring layers by baking a deposited layer constituting a widewidth wiring section and another deposited layer constituting a narrow-width wiring section while the layers are respectively held in different atmospheres. CONSTITUTION:After a grand plane layer which is composed of Bi, Pb, Sr, Ca, and Cu respectively contained at a ratio of Bi:Pb:Sr:Ca:Cu=1.0:0.9:1.0:1.0:1.7, has a size of 10mmX10mm, and contains no pattern and a signal layer having a line width of 1mm are deposited to a thickness of 1m, the layers are baked with such a prescribed temperature profile that the layers are maintained at 805 deg.C for 20 minutes after raising the temperature from a room temperature to 805 deg.C and maintained at 855 deg.C for 1 hour after the temperature is further raised from 805 deg.C to 855 deg.C, and then, the temperature of the layers is lowered to the room temperature. It is found as a result of X-ray diffraction investigations that the Ca2PbO2 peak is high in the grand plane layer having the 10mmX10mm size, but very weak in the signal layer having the 1-mm line width. |
