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发明名称
INSPECTION APPARATUS
摘要
申请公布号
JPH04284639(A)
申请公布日期
1992.10.09
申请号
JP19910048480
申请日期
1991.03.13
申请人
SEIKO INSTR INC
发明人
TANAKA KATSUNORI
分类号
G01R1/073;G01R31/26;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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