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经营范围
发明名称
ITO SPUTTERING TARGET
摘要
申请公布号
JPH04285163(A)
申请公布日期
1992.10.09
申请号
JP19910070576
申请日期
1991.03.11
申请人
NIKKO KYODO CO LTD
发明人
NAKAJIMA KOICHI;KUWANO KATSUO;SATO NORIAKI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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