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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH04285159(A)
申请公布日期
1992.10.09
申请号
JP19910047178
申请日期
1991.03.13
申请人
HITACHI LTD
发明人
KAMEI MITSUHIRO;SETOYAMA HIDETSUGU;TAGUCHI YASUO
分类号
C23C14/34;C23C14/50
主分类号
C23C14/34
代理机构
代理人
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