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发明名称
METHOD FOR VAPORIZING METAL
摘要
申请公布号
JPH04285157(A)
申请公布日期
1992.10.09
申请号
JP19910046397
申请日期
1991.03.12
申请人
HITACHI LTD
发明人
KOBANAWA AKIRA;ASANO TAKASHI
分类号
C23C14/24;C23C14/30
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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